EVIDENCE FOR AN INHOMOGENEOUS DISTRIBUTION OF THERMAL DONORS IN SILICON FORM ELECTRICAL AND OPTICAL MEASUREMENTS
- Author(s):
- Publication title:
- Defects in Semiconductors : Proceedings of the 14th International Conference on Defects in Semiconductors, ICDS-14, Paris, France, August 18-22, 1986
- Title of ser.:
- Materials science forum
- Ser. no.:
- 10-12
- Pub. Year:
- 1986
- Vol.:
- Part3
- Page(from):
- 979
- Page(to):
- 984
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878495511 [0878495517]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
North-Holland |
Trans Tech Publications |
8
Conference Proceedings
SELECTIVE HYDROGEN PASSIVATION OF OXYGEN-RELATED THERMAL-DONOR CLUSTERS IN SILICON.
Trans Tech Publications |
3
Conference Proceedings
INTRODUCTORY REMARKS: FIFTY YEARS AFTER POLY-GERMANIUM: COUNTING ON PERFECTED SILICON
Electrochemical Society |
9
Conference Proceedings
MEASUREMENTS OF ENHANCED OXYGEN DIFFUSION IN SILICON DURING THERMAL DONOR FORMATION: NEW EVIDENCE FOR POSSIBLE MECHANISMS
Materials Research Society |
Electrochemical Society |
North-Holland |
Materials Research Society |
11
Conference Proceedings
PROPERTIES OF THE SHALLOW THERMAL DONORS IN CZ-SILICON AS STUDIED BY PHOTOTHERMAL IONIZATION SPECTROSCOPY.
Trans Tech Publications |
Materials Research Society |
12
Conference Proceedings
A Low Temperature Technology on the Base of Hydrogen Enhanced Thermal Donor Formation for Future High-Voltage Applications
SPIE-The International Society for Optical Engineering |