Optical measurement methods for MEMS applications

Optical measurement methods for MEMS applications

Author(s):

Grosser, V. ( Frauhofer Institute Reliability and Microintegration, Germany )
Bombach, C.
Faust, W.
Vogel, D.
Michel, B.

Publication title:

International Conference on Applied Optical Metrology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3407

Pub. Year:

1998

Page(from):

340

Page(to):

347

Pub. info.:

Bellingham, Wash.: SPIE--International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819428592 [0819428590]

Language:

English

Call no.:

P63600/3407

Type:

Conference Proceedings

Details

TDL ID:	ZA00020674
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Applied Optical Metrology
Conf. info. (Number):	1998
Conf. info. (Venue):	Balatonfured, Hungary
Conf. info. (Date):	1998.06.08-1998.06.11

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