Multiwavelength ATR reflectometry of thin films

Author(s):

• Hoffmann, A. ( Research Institute of Solid State Physics, Hungary )
• Kroo, N.
• Lenkefi, Z.
• Szentirmay, Z.

Publication title:

International Conference on Applied Optical Metrology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3407

Pub. Year:

1998

Page(from):

256

Page(to):

261

Pub. info.:

Bellingham, Wash.: SPIE--International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819428592 [0819428590]

Language:

English

Call no.:

P63600/3407

Type:

Conference Proceedings