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Laser beam removal of microstructures with Nd:YAG lasers

Author(s):
  • Hellrung,D. ( Fraunhofer-Institut fur Lasertechnik(FRG) )
  • Gillner,A. ( Fraunhofer-Institut fur Lasertechnik(FRG) )
  • Foprawe,R. ( Fraunhofer-Institut fur Lasertechnik(FRG) )
Publication title:
Lasers in material processing : 16-20 June, 1997, Munich, FRG
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3097
Pub. Year:
1997
Page(from):
267
Page(to):
273
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425171 [0819425176]
Language:
English
Call no.:
P63600/3097
Type:
Conference Proceedings

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