X-ray micromachining of deep 3D terahertz waveguide components using a laser plasma source at 1-nm wavelength

X-ray micromachining of deep 3D terahertz waveguide components using a laser plasma source at 1-nm wavelength

Author(s):

Turcu,I.C.E. ( Rutherford Appleton Lab. (UK) )

Mann,C.M. ( Rutherford Appleton Lab. (UK) )

Moon,S.W. ( Rutherford Appleton Lab. (UK) and Korea Institute of Science and Technology )

Maddison,B.J. ( Rutherford Appleton Lab. (UK) )

Allott,R.M. ( Rutherford Appleton Lab. (UK) )

Lisi,N. ( Rutherford Appleton Lab. (UK) )

Huq,S.E. ( Rutherford Appleton Lab. (UK) )

Kim,N. ( Rutherford Appleton Lab. (UK) and Kumho Information and Telecommunication Lab. (Korea) )

3 more

Publication title:

Applications of X rays generated from lasers and other bright sources : 31 July-1 August 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3157

Pub. Year:

1997

Page(from):

291

Page(to):

301

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425799 [0819425796]

Language:

English

Call no.:

P63600/3157

Type:

Conference Proceedings

Details

TDL ID:	ZA00020659
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : SPIE Conference on Applications of X Rays Generated from Lasers and Other Bright Sources
Conf. info. (Number):	1997
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.07.31-1997.08.01

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