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Optical heterodyne surface profiling interferometer with automatic focusing (Invited Paper)

Author(s):
  • Zhao,H. ( Tsinghua Univ.(China) )
  • Liang,R. ( Tsinghua Univ.(China) )
  • Wu,Y. ( National Univ.of Singapore )
  • Li,D. ( Tsinghua Univ.(China) )
  • Cao,M. ( Tsinghua Univ.(China) )
Publication title:
Automatic inspection and novel instrumentation : 25-26 June 1997, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3185
Pub. Year:
1997
Page(from):
100
Page(to):
104
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426123 [0819426121]
Language:
English
Call no.:
P63600/3185
Type:
Conference Proceedings

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