Blank Cover Image

Noncontact ultrasonic ULSI process metrology using ultrafast lasers

Author(s):
Stoner,R.J. ( Brown Univ. )
Morath,C.J. ( Rudolf Technologies )
Tas,G. ( Rudolf Technologies )
Sengupta,S.S. ( VLSI Technologies )
Merchant,S.M. ( Lucent Technologies/Bell Labs. )
Bindell,J.B. ( Lucent Technologies/Bell Labs. )
Maris,H.J. ( Brown Univ. )
2 more
Publication title:
Commercial applications of ultrafast lasers : 29-30 January 1998, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3269
Pub. Year:
1998
Page(from):
104
Page(to):
112
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427083 [081942708X]
Language:
English
Call no.:
P63600/3269
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings DETECTION OF THIN INTERFACIAL LAYERS BY PICOSECOND ULTRASONICS

Tas, G., Stoner, R.J., Maris, H.J., Rubloff, G.W., Oehrlein, G.S., Halbout, J.M.

Materials Research Society
7 Conference Proceedings Three-dimensional optical storage by use of an ultrafast laser

Huang, S.M., Hong, M.H., Wu, D.J., Van, L.H., Ong, T.S., Luk'yanchuk, B.S., Chong, T.C.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Approach to CD-SEM metrology utilizing the full waveform signal

McIntosh,J.M., Kane,B.C., Bindell,J.B., Vartuli,C.B.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Phase retardation symmetric design of a refractive and diffractive element for linearizing sinusoidal scanning [6375-05]

Haji-Saeed, B., Sengupta, S. K., Khoury, J., Morath, C. P., Woods, C. L., Kierstead, J.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Microstructural Analysis Of Copper Interconnections Using Picosecond Ultrasonics

Harper, J.M., Malhotra, S.G., Cabral, Jr., C., Lavoie, C., Hao, H., Homsi, W., Maris, H.J.

Materials Research Society
9 Conference Proceedings Multiparameter process metrology using scatterometry

Raymond,C.J., Murnane,M.R., Prins,S.L., Sohail,S., Naqvi,S.H., McNeil,J.R.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Studies of plasticity in thin Al films using picosecond ultrasonics

Antonelli, G. A., Maris, H. J.

MRS-Materials Research Society
10 Conference Proceedings Ultrafast holographic recording of snake infrared pit tissue using two-photon induced photopolymerization

Stone,M.O., Baur,J.W., Sowards,L.A., Kirkpatrick,S.M.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Non-Destructive Evaluation of Interfaces in BSOI Structures using the Picosecond Ultrasonics Technique

Sadana, D.K., Hao, H.-Y., Maris, H.J.

Electrochemical Society
11 Conference Proceedings *DEVELOPMENT OF REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION PROCESSES THROUGH THE USE IN VACUO ELECTRON DIFFRACTION AND ELECTRON SPECTROCOPY

Rudder, R.A., Fountain, G.G., Hattangady, S.V., Posthill, J.B., Markunas, R.J.

Materials Research Society
6 Conference Proceedings Study on the In Situ Growth of Carbon Nanotubes for the Reinforcement of Cf/SiC Composite Fabricated by CVI+PIP Process

J.B. Hu, S.M. Dong, X.Y. Zhang, Z. Wang, H.J. Zhou

Trans Tech Publications
12 Conference Proceedings Laser ultrasonics for process control:issues for implementation

Ehrlich,M.J., Murray,T.W., Wagner,J.W., Baldwin,K.C., Spicer,J.B.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12