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Synthesis of high-quality Si1-yCy and Si1-x-yGexCy epitaxial layers on (100)Si by ion implantation and pulsed excimer laser crystallization

Author(s):
Grob,J.-J. ( Lab.PHASE/CNRS (France) )
Fogarassy,E. ( Lab.PHASE/CNRS (France) )
Grob,A. ( Lab.PHASE/CNRS (France) )
Muller,D. ( Lab.PHASE/CNRS (France) )
Prevot,B. ( Lab.PHASE/CNRS (France) )
Stuck,R. ( Lab.PHASE/CNRS (France) )
de Unamuno,S. ( Lab.PHASE/CNRS (France) )
Boher,P. ( SOPRA SA (France) )
Stehle,M.X. ( SOPRA SA (France) )
4 more
Publication title:
ALT '97, International Conference on Laser Surface Processing : 8-12 September 1997, Limoges, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3404
Pub. Year:
1998
Page(from):
47
Page(to):
56
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428554 [0819428558]
Language:
English
Call no.:
P63600/3404
Type:
Conference Proceedings

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