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Formation of high-performance PtSi/p-Si Schottky barrier detector using high-resolution transmission electron microscope

Author(s):
  • Wang,W.-S. ( Chung Shan Institute of Science and Technology (Taiwan) )
  • Ho,C. ( Chung Shan Institute of Science and Technology (Taiwan) )
  • Chuang,T.-M ( Chung Shan Institute of Science and Technology (Taiwan) )
Publication title:
Optoelectronic Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3419
Pub. Year:
1998
Page(from):
169
Page(to):
176
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428738 [0819428736]
Language:
English
Call no.:
P63600/3419
Type:
Conference Proceedings

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