Novel method to eliminate SOG-etching-back-induced random particle
- Author(s):
- Hsu,C.F. ( Taiwan Semiconductor Manufacturing Co. )
- Chang,C.H. ( Taiwan Semiconductor Manufacturing Co. )
- Yu,M.K. ( Taiwan Semiconductor Manufacturing Co. )
- Peng,Y.S. ( Taiwan Semiconductor Manufacturing Co. )
- Publication title:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3507
- Pub. Year:
- 1998
- Page(from):
- 272
- Page(to):
- 280
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429667 [081942966X]
- Language:
- English
- Call no.:
- P63600/3507
- Type:
- Conference Proceedings
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