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Chemical rate model for the surface pyrolysis of tetrakis (dimethylamido) titanium to form titanium nitride films

Author(s):
Publication title:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3507
Pub. Year:
1998
Page(from):
100
Page(to):
105
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429667 [081942966X]
Language:
English
Call no.:
P63600/3507
Type:
Conference Proceedings

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