Development and testing of an active platen for IC manufacturing

Development and testing of an active platen for IC manufacturing

Author(s):

Redmond,J.M. ( Sandia National Labs. )
Barney,P. ( Sandia National Labs. )
Smith,T.G. ( Sandia National Labs. )
Darnold,J.R. ( Sandia National Labs. )

Publication title:

Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3507

Pub. Year:

1998

Page(from):

54

Page(to):

60

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429667 [081942966X]

Language:

English

Call no.:

P63600/3507

Type:

Conference Proceedings

Details

TDL ID:	ZA00020632
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Process, Equipment, and Materials Control in Integrated Circuit Manufacturing
Conf. info. (Number):	1998 : 4th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.23-1998.09.24

Similar Items:

1 Conference Proceedings Development of an active boring bar for increased chatter immunity Redmond,J.M., Barney,P., Smith,D. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Active sensors for health monitoring of aging aerospace structures Giurgiutiu,V., Redmond,J.M., Roach,D.P., Rackow,K. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Wafer and reticle positioning system for the extreme ultraviolet lithography engineering test stand Wronosky,J.B., Smith,T.G., Craig,M.J., Sturgis,B.R., Darnold,J.R., Werling,D.K., Kincy,M.A., Tichenor,D.A., … SPIE - The International Society for Optical Engineering	8 Conference Proceedings Charge-coupled devices with fast timing for astrophysics and space physics research Cherry,M.L., Altice,P.P.,Jr., Ellison,S.B., Guzik,T.G., Macri,J.R., McConnell,M.L., McLean,G.Y., Ryan,J.M., Suni,P.P. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Characteristics of Self-sensing Actuation for Active Control Barney,P., Redmond,J., Smith,D. Society for Experimental Mechanics	9 Conference Proceedings Active optics at UKIRT Chrysostomou,A.C., Rees,N.P., Hawarden,T.G., Chuter,T.C., Cavedoni,C.P., Pettie,D.G., Bennett,R.J., Atad,E.E., … SPIE-The International Society for Optical Engineering
4 Conference Proceedings Recent advances in the Sandia EUV 10x microstepper (Invited Paper) Goldsmith,J.E.M., Wronosky,J.B., Barr,P.K., Berger,K.W., Bernardez II,L.J., Cardinale,G.F., Darnold,J.R., Folk,D.R., … SPIE-The International Society for Optical Engineering	10 Conference Proceedings MEMS sensors and wireless telemetry for distributed systems Britton,C.L.,Jr., Warmack,R.J., Smith,S.F., Oden,P.I., Brown,G.M., Bryan,W.L., Clonts,L.G., Duncan,M.G., Emery,M.S., … SPIE-The International Society for Optical Engineering
5 Conference Proceedings A hinged-pad test structure for sliding friction measurement in micromachining de Boer,M.P., Redmond,J.M., Michalske,T.A. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Probabilistic Risk Assessment: Why a Standard Is Needed M. T. Drouin, M. A. Cunningham, T. L. King, G. M. Holahan, R. J. Barrett, A. M. Barney-Smith American Society of Mechanical Engineers
6 Conference Proceedings System and process learning in a full-field, high-power EUVL alpha tool Ballard, W.P., Tichenor, D.A., O'Connell, D.J., II, L.J.B., Lafon, R.E., Anderson, R.J.M., Leung, A.H., Williams, K.A., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings Adaptive Control of a Magnetically Levitated Spindle Barney,P., Lauffer,J.P., Redmond,J., Sullivan,W. Society for Experimental Mechanics

1

2

3

4

5

6

7

8

9

10

11

12