Evaluation of optical supersmooth surface using AFM and comparison to interference method
- Author(s):
- Publication title:
- Current developments in optical elements and manufacturing : 16-18 September 1998, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3557
- Pub. Year:
- 1998
- Page(from):
- 336
- Page(to):
- 344
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430182 [0819430188]
- Language:
- English
- Call no.:
- P63600/3557
- Type:
- Conference Proceedings
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