PE-CVD of Polymer Films: Mechanisms, Chemistry, and Diagnostics

PE-CVD of Polymer Films: Mechanisms, Chemistry, and Diagnostics

Author(s):: d'Agostino R.
Publication title:: Plasma processing of polymers : proceedings of the NATO Advanced Study Institute on Plasma Treatments and Deposition of Polymers, Acquafredda di Maratea, Italy, May 19-June 2, 1996
Title of ser.:: NATO ASI series. Series E, Applied sciences
Ser. no.:: 346
Pub. Year:: 1997
Page(from):: 3
Page(to):: 46
Pages:: 44
Pub. info.:: Boston: Kluwer Academic Publishers
ISSN:: 0168132X
ISBN:: 9780792348597 [0792348591]
Language:: English
Call no.:: N11482/346
Type:: Conference Proceedings

Details

TDL ID:	ZA00020583
Series ID:	PA00000018
Conf. info. (Name):	NATO Advanced Study Institute on Plasma Treatments and Deposition of Polymers
Conf. info. (Number):	1996
Conf. info. (Venue):	Acquafredda di Maratea, Italy
Conf. info. (Date):	1996.05.19-1996.06.02

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