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Pulsed Excimer Laser Crystallization and Doping for the Fabrication of Poly-Si and SiGe TFTs

Author(s):
Publication title:
Excimer lasers
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
265
Pub. Year:
1994
Page(from):
387
Page(to):
402
Pages:
16
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792328193 [0792328191]
Language:
English
Call no.:
N11482/265
Type:
Conference Proceedings

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