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Chemical Vapour Deposition of Crystalline and Amorphous Carbon, Silicon and Germanium Films

Author(s):
HESS P.  
Publication title:
Excimer lasers
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
265
Pub. Year:
1994
Page(from):
103
Page(to):
119
Pages:
17
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792328193 [0792328191]
Language:
English
Call no.:
N11482/265
Type:
Conference Proceedings

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