Excimer Laser Patterning and Etching of Metals
- Author(s):
- Publication title:
- Emerging technologies for in situ processing
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 139
- Pub. Year:
- 1988
- Page(from):
- 105
- Page(to):
- 112
- Pages:
- 8
- Pub. info.:
- Dordrecht: Martinus Nijihoff Publishers
- ISSN:
- 0168132X
- ISBN:
- 9789024737338 [9024737338]
- Language:
- English
- Call no.:
- N11482/139
- Type:
- Conference Proceedings
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