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High-power excimer laser with excellent energy stability

Author(s):
Publication title:
Advanced high-power lasers : 1-5 November 1999, Osaka, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3889
Pub. Year:
2000
Page(from):
788
Page(to):
792
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434876 [0819434876]
Language:
English
Call no.:
P63600/3889
Type:
Conference Proceedings

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