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Potential of dry etching for the fabrication of fused-silica micro-optical elements

Author(s):
Publication title:
Micromachine technology for diffractive and holographic optics : 20-21 September 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3879
Pub. Year:
1999
Page(from):
63
Page(to):
70
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434760 [0819434760]
Language:
English
Call no.:
P63600/3879
Type:
Conference Proceedings

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