Small displacement measurements based on total-internal-reflection heterodyne interferometry

Small displacement measurements based on total-internal-reflection heterodyne interferometry

Author(s):

Chiu,M.-H. ( Chien Hsin College of Technology and Commerce )
Lin,J.-Y.
Su,D.-C.

Publication title:

Three-dimensional imaging, optical metrology, and inspection V : 19-20 September 1999, Boston, Massachusetts

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3835

Pub. Year:

1999

Page(from):

32

Page(to):

38

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434289 [0819434280]

Language:

English

Call no.:

P63600/3835

Type:

Conference Proceedings

Details

TDL ID:	ZA00020411
Series ID:	PA00000029
Conf. info. (Name):	Photonics East : Three-dimensional imaging, optical metrology, and inspection
Conf. info. (Number):	1999 : 5th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.09.19-1999.09.20

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