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Microlens arrays based on chalcogenide glass resists using the proximity microlithcgraphy method

Author(s):
Publication title:
Gradient-index, miniature, and diffractive optical systems : 19 and 21 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3778
Pub. Year:
1999
Page(from):
158
Page(to):
162
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432643 [0819432644]
Language:
English
Call no.:
P63600/3778
Type:
Conference Proceedings

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