High-average-power excimer lasers
- Author(s):
Borisov,V.M. ( Troitsk Institute for Innovation and Fusion Research ) Demin,A.I. Khristoforov,O.B. Kirykhin,Yu.B. Vinokhodov,A. Vodchits,V. Basting,D. Stamm,U. Voss,F. Bragin,I. - Publication title:
- XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3574
- Pub. Year:
- 1998
- Page(from):
- 56
- Page(to):
- 66
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430397 [0819430390]
- Language:
- English
- Call no.:
- P63600/3574
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Theoretical and experimental investigations of the 1-kW XeCl laser with UV pre-ionization
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Recent advances in the development of coherent and incoherent UV and EUV discharge sources
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |