Hybrid optical-computational methodology for studies and optimization of microelectronic components

Author(s):

• Furlong,C. ( Worcester Polytechnic Institute )
• Pryputniewicz,R.J.

Publication title:

Laser interferometry X : techniques and analysis : 31 July-1 August 2000, Sandiego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4101

Pub. Year:

2000

Vol.:

Part A

Page(from):

66

Page(to):

76

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819437464 [0819437468]

Language:

English

Call no.:

P63600/4101

Type:

Conference Proceedings