Fabrication of high-performance PZT actuator using microwave sintering process
- Author(s):
- Takahashi,H. ( Fuji Ceramics Corp. )
- Kato,K.
- Qiu,J.
- Tani,J.
- Publication title:
- Smart structures and materials 2000 : Active materials : behavior and mechanics : 6-9 March, 2000, Newport Beach, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3992
- Pub. Year:
- 2000
- Page(from):
- 614
- Page(to):
- 620
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436108 [0819436100]
- Language:
- English
- Call no.:
- P63600/3992
- Type:
- Conference Proceedings
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