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Effects of CF4 addition on the growth of amorphous CNx films by plasma decomposition of CH4-N2 gas mixtures

Author(s):
Publication title:
Amorphous and nanostructured carbon : sympoisum held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
593
Pub. Year:
2000
Page(from):
505
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995017 [1558995013]
Language:
English
Call no.:
M23500/593
Type:
Conference Proceedings

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