Micromachined polysilicon resonating xylophone bar magnetometer: Resonance characteristics

Micromachined polysilicon resonating xylophone bar magnetometer: Resonance characteristics

Author(s):

Lamb, J. L.

Publication title:

Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

605

Pub. Year:

2000

Page(from):

211

Pub. info.:

Warrendale, Pa.: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995130 [1558995137]

Language:

English

Call no.:

M23500/605

Type:

Conference Proceedings

Details

TDL ID:	ZA00020366
Series ID:	PA00000011
Conf. info. (Name):	Materials Science of Microelectromechanical Systems (MEMS) Devices : Symposium
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.11.29-1999.12.01

Similar Items:

1 Conference Proceedings Polysilicon xylophone bar magnetometers Wickenden,D.K., Champion,J.L., Givens,R.B., Kistenmacher,T.J., Lamb,J.L., Oslander,R. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Thermal stressing techniques for flaw characterization with shearography J.W.M. Spicer, J.L. Champion, R. Osiander, J.B. Spicer Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings MEMS-based resonating xylophone bar magnetometers Wickenden,D.K., Givens,R.B., Osiander,R., Champion,J.L., Oursler,O.A., Kistenmacher,T.J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings MEMS in Aerospace Applications - Thermal Control Shutters Osiander, R., Champion, J.L., Darrin, M.A. IMAPS
3 Conference Proceedings Development of a MEMS xylophone bar magnetometer using optical interferometry for detection Miragliotta, Joseph, Osiander, R., Champion, J. L., Oursler, D. A., Kistenmacher, T. J. MRS-Materials Research Society	9 Conference Proceedings Micromachined magnetometer-accelerometer for a navigation system Cho, J.-M., Kim, K.S., An, S.D., Park, H.J., Hahm, G. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Design and Properties of a Thin-Film, MEMS-Based Magnetostrictive Magnetometer Kistenmacher, T. J., Osiander, R., Ecelberger, S. A., Givens, R. B., Wickenden, D. K., Murphy, J. C. MRS - Materials Research Society	10 Conference Proceedings Actuation of polysilicon surface-micromachined mirrors Tien,N.C., Kiang,M.-H., Daneman,M.J., Solgaard,O., Lau,K.Y., Muller,R.S. SPIE-The International Society for Optical Engineering
5 Conference Proceedings A micromachined flat plasma spectrometer (FlaPS) Wesolek, D.M., Champion, J.L., Herrero, F.A., Osiander, R., Champion, R.L., Darrin, A.M. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Design and performance of a polysilicon surface-micromachined microengine realized with arrays of asymmetrical electrothermal microactuators Kolesar,E.S., Ruff,M.D., Ko,S.Y., Wilks,R.J., Howard,J.T., Allen,P.B., Wilken,J.M., Bosch,J.E. SPIE-The International Society for Optical Engineering
6 Technical Paper Micromachined Louver Arrays for Spacecraft Thermal Control Radiators Osiander,R., Champion,J.L., Darrin,A.M., Sniegowski,J.J., Rodgers,S.M., Douglas,D., Swanson,T.D. American Institute of Aeronautics and Astronautics	12 Conference Proceedings Micromachining inertial instruments Weinberg,M.S., Bernstein,J., Borenstein,J.T., Campbell,J., Cousens,J., Cunningham,R.K., Fields,R., Greiff,P., Hugh,B., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12