Effect of As-processed and annealed microstructures on the mechanical properties of LIGA Ni MEMS

Effect of As-processed and annealed microstructures on the mechanical properties of LIGA Ni MEMS

Author(s):

Publication title:

Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

605

Pub. Year:

2000

Page(from):

197

Pub. info.:

Warrendale, Pa.: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995130 [1558995137]

Language:

English

Call no.:

M23500/605

Type:

Conference Proceedings

Details

TDL ID:	ZA00020366
Series ID:	PA00000011
Conf. info. (Name):	Materials Science of Microelectromechanical Systems (MEMS) Devices : Symposium
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.11.29-1999.12.01

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