Impurity Diffusion in SiGe Alloys: Strain and Composition Effects

Impurity Diffusion in SiGe Alloys: Strain and Composition Effects

Author(s):: Larsen, Arne Nylandsted
Publication title:: Diffusion mechanisms in crystalline materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 527
Pub. Year:: 1998
Page(from):: 357
Pub. info.:: Warrendale, Pa.: MRS - Materials Research Society
ISSN:: 02729172
ISBN:: 9781558994331 [1558994335]
Language:: English
Call no.:: M23500/527
Type:: Conference Proceedings

Details

TDL ID:	ZA00020315
Series ID:	PA00000011
Conf. info. (Name):	Symposium on diffusion mechanisms in crystalline materials
Conf. info. (Number):	1998
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1998.04.13-1998.04.16

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