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Identification of Vacancy-Like Defects in High-Rate Grown a-Si Before and After Light Soaking by VEPAS

Author(s):
Zou, X.
Chan, Y. C.
Webb, D. P.
Lam, Y. W.
Lin, S. H.
Chan, F. Y. M.
Hu, Y. F.
Weng, X.
Beling, C. D.
Fung, S.
5 more
Publication title:
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
507
Pub. Year:
1999
Page(from):
637
Pub. info.:
Warrendale: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994133 [1558994130]
Language:
English
Call no.:
M23500/507
Type:
Conference Proceedings

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