Blank Cover Image

AFM Analysis of HF Vapor Cleaned SiO2 Surfaces

Author(s):
Publication title:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
477
Pub. Year:
1997
Page(from):
481
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993815 [1558993819]
Language:
English
Call no.:
M23500/477
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THE ROLE OF OXIDE IMPURITIES IN SURFACE RESIDUE NUCLEATION DUE TO ANHYDROUS HF/METHANOL VAPOR PHASE CLEANING

Carter, R.J., Hauser, J.R., Nemanich, R.J.

Electrochemical Society
7 Conference Proceedings PLASMA SURFACE INTERACTIONS AND SURFACE PRORERTIES FOR REMOTE H-PLASMA CLEANING OF Si(100)

Schneider, T. P., Cho, J., Chen, Y. L., Maher, D. M., Nemanich, R. J.

MRS - Materials Research Society
2 Conference Proceedings iN SiTU SURFACE ANALYSIS IN HF VAPOR-PHASE CLEANING OF Si

Oostra, D.J., Hakkens, F.J.G.

Electrochemical Society
8 Conference Proceedings Chemical, Electrical, and Structural Properties of Au/Pd Contacts on Chemical Vapor Cleaned p-type GaN Surfaces

Hartlieb, P.J., Roskowski, A., Rodriguez, B.J., Nemanich, R.J., Davis, R.F.

Materials Research Society
3 Conference Proceedings Comparison of ALD of HfO2, SiO2, and HfSiOx Thin Films Using Various Metal/Silicon Alkylamide Precursors and O3

L. Bartholomew, C. Barelli, J. Owyang, R. DiCarlo, D. Shenai

Electrochemical Society
9 Conference Proceedings ANALYSIS OF THE HF-ETHANOL CLEANING PROCESS ON SILICON WAFERS WITH 100 VICINAL SURFACES

Portillo, J., Gual, J., Sarrabayrouse, G., Morante, J. R.

MRS - Materials Research Society
4 Conference Proceedings Measurements of the Band Offset of SiO2 on Clean GaN

Hurt, E.H., Cook, Ted E. Jr.,, Tracy, K.M., Davis, R.F., Lucovsky, G, Nemanich, R.J.

Materials Research Society
10 Conference Proceedings LOCAL STRUCTURAL STUDIES OF TiSi2 AND ZrSi2 THIN FILMS ON Si(111) SURFACES

Dao, Y., Edwards, A. M., Sayers, D. E., Nemanich, R. J.

MRS - Materials Research Society
5 Conference Proceedings INFLUENCE OF SURFACE PRE-CLEANING ON ELECTRICAL PROPERTIES OF RAPID THERMAL OXIDE AND RAPID THERMAL CHEMICAL VAPOR DEPOSITION OXIDE

Xu, Xiaoli, Kuehn, R.T., Melzak, J.M., Hames, G.A., Wortman, J.J., Ozturk, M.C., Nemanich, R.J., Harris, G., Maher, D.

Materials Research Society
11 Conference Proceedings THE EFFECTS OF CHEMICAL VAPOR CLEANING CHEMISTRIES ON SILICON SURFACES

Beck, S. E., Gilicinski, A. G., Felker, B. S., Langan, J. G., Bohling, D. A., George, M. A., Ivankovits, J. C., Rynders, …

MRS - Materials Research Society
6 Conference Proceedings Raman Analysis of Electron-Phonon Interactions in GaN Films

Bergman, L., Bremser, M. D., Christman, J. A., King, S. W., Davis, R. F., Nemanich, R. J.

MRS - Materials Research Society
12 Conference Proceedings REDUCTION OF SURFACE ROUGHENING AND SUBSURFACE DEFECTS IN H-PLASMA CLEANING OF Si (100)

Schneider, T.P., Montgomery, J.S., Ying, H., Barnak, J.P., Chen, Y.L., Maher, D.M., Nemanich, R.J.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12