Chemical Mechanical Cleaning for Post-CMP Applications: Defects and Metals Results
- Author(s):
Zhao, E. Y. Emami, R. Malik, I. Mishra, K. Krusell, W. C. Larios, J. de Hymes, D. J. - Publication title:
- Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 477
- Pub. Year:
- 1997
- Page(from):
- 137
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993815 [1558993819]
- Language:
- English
- Call no.:
- M23500/477
- Type:
- Conference Proceedings
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