Blank Cover Image

Particulate Removal From Silicon Substrates in Megasonic-Assisted Dilute SC1 Chemistry

Author(s):
Publication title:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
477
Pub. Year:
1997
Page(from):
21
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993815 [1558993819]
Language:
English
Call no.:
M23500/477
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THE ROLE OF MEGASONIC ENERGY IN PARTICULATE REMOVAL FROM SILICON SUBSTRATES IN DILUTE SC1 CHEMISTRY

Kashkoush, I., Brause, E., Grant, R., Novak, R.

Electrochemical Society
7 Conference Proceedings THE USE OF OZONATED HF SOLUTIONS FOR POLYSILICON STRIPPING

Chen, Gim S., Kashkoush, Ismail, Novak, Richard E.

Electrochemical Society
2 Conference Proceedings In Situ Chemical Concentration Control for Wafer Wet Cleaning

Kashkoush, Ismail, Brause, Eric, Novak, Richard, Grant, Robert

MRS - Materials Research Society
8 Conference Proceedings THE USE OF ULTRASOUND ENERGY IN PHOTORESIST STRIPPING APPLICATIONS

Kashkoush, Ismail I.

Electrochemical Society
3 Conference Proceedings WAFER' S BACKSIDE CLEANING WITH A SINGLE-WAFER TOOL

Liu, LEWIS, BRAUSE, ERIC, KASHKOUSH, ISMAIL, WALTER, ALAN, NOVAK, RICHARD

Electrochemical Society
9 Conference Proceedings PERFORMANCE OF 'DDC': DILUTED DYNAMIC CLEAN BEFORE 4.5 nm GATE OXIDE

Boelen, P., Matthews, R., Kashkoush, I., Novak, R.

Electrochemical Society
4 Conference Proceedings Photoresist Stripping Using Ozone/Deionized Water Chemistry

Kashkoush, I., Matthews, R., Novak, R., Brause, E., Carrillo, F., Rajaram, B.

MRS - Materials Research Society
10 Conference Proceedings Particle Removal from Si Substrates in Organic Solvents using Megasonic Energy

F. Barbagini, T. Janssens, T. Bearda, S. Armini, J. Van Hoeymissen

Electrochemical Society
5 Conference Proceedings OPTIMIZATION OF DILUTE SC1

Boelen, P., Lardin, T., Sandrier, B., Matthews, R., Kashkoush, I., Novak, R., Tardif, F.

Electrochemical Society
11 Conference Proceedings Using Megasonics to Extend Chemical Cleans for 45nm Technology

C. Franklin, Y. Fan, E. Brause, V. Nguyen

Electrochemical Society
6 Conference Proceedings Key issues in substrate and liquid phase epitaxy of Hg1-xCdxTe from Hg-rich and Te-rich solutions

Gupta,S.C.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Thermodynamics of Dilute Protein Solutions from Colloidal Interactions

Grant, M.

American Institute of Chemical Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12