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The Effect of Inorganic Thin Film Material Processing and Properties on Stress in Silicon Piezoresistive Pressure Sensors

Author(s):
Publication title:
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
444
Pub. Year:
1997
Page(from):
221
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993488 [1558993487]
Language:
English
Call no.:
M23500/444
Type:
Conference Proceedings

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