Improved Autoadhesion Measurement Method for Micromachined Polysilicon Beams
- Author(s):
- Publication title:
- Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 444
- Pub. Year:
- 1997
- Page(from):
- 87
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993488 [1558993487]
- Language:
- English
- Call no.:
- M23500/444
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Interferometric measurement for improved understanding of boundary effects in micromachined beams
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Contact angle measurements on polysilicon for surface micromachining applications
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
A hinged-pad test structure for sliding friction measurement in micromachining
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Role of interfacial properties on MEMS performance and reliability (Invited Paper)
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
Materials Research Society |
4
Conference Proceedings
Self-tensioning Support Post Design to Control Residual Stress in MEMS Fixed-Fixed Beams
Materials Research Society |
10
Conference Proceedings
Controlling Environment and Contact Materials to Optimize Ohmic Microrelay Lifetimes
Materials Research Society |
5
Conference Proceedings
Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
MRS-Materials Research Society |
SPIE-The International Society for Optical Engineering |