Controlled Grain Size and Location in Ge Thin Films on Silicon Dioxide by Low Temperature Selective Solid Phase Crystallization

Controlled Grain Size and Location in Ge Thin Films on Silicon Dioxide by Low Temperature Selective Solid Phase Crystallization

Author(s):

Publication title:

Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

403

Pub. Year:

1996

Page(from):

113

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993068 [1558993061]

Language:

English

Call no.:

M23500/403

Type:

Conference Proceedings

Details

TDL ID:	ZA00020303
Series ID:	PA00000011
Conf. info. (Name):	Symposium on polycrystalline thin films
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.27-1995.12.01

Similar Items:

1 Conference Proceedings Polycrystalline Si Films Fabricated by Low-Temperature Selective Nucleation and solid-Phase Epitaxy Process Chen, Claudine M., Atwater, Harry A. MRS - Materials Research Society	7 Conference Proceedings Optical Characterization of Solid Phase Crystallization of Silicon Thin Films Obtained by LPCVD Modreanu, M., Gartner, M., Cobianu, C., Hurley, P. Electrochemical Society
2 Conference Proceedings STABILITY OF NANOMETER-SIZE Si CRYSTALS IN AMORPHOUS Si THIN FILMS UNDER ION IRRADIATION Yang, Chih M., Atwater, Harry A. MRS - Materials Research Society	8 Conference Proceedings Large-Grain Polysilicon Films With Low Intra- Granular Defect Density By Low-Temperature Solid-Phase Crystallization Bo, Xiang-Zheng, Yao, Nan, Sturm, J.C. Materials Research Society
3 Conference Proceedings LOW ENERGY ION BOMBARDMENT AND MICROSTRUCTURAL EVOLUTION IN THIN FILMS Yang, Chih M., Atwater, Harry A. Materials Research Society	9 Conference Proceedings A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition for Photovoltaic Devices Richardson, Christine Esber, Kayes, Brendan M., Dicken, Matthew J., Atwater, Harry A. Materials Research Society
4 Conference Proceedings *Ni-induced selective nucleation and solid phase epitaxy of large-grained poly-Si on glass Puglisi, Rosaria A., Tanabe, Hiroshi, Chen, Claudine M., Atwater, Harry A., Rimini, Emanuele MRS-Materials Research Society	10 Conference Proceedings Advanced excimer laser crystallization techniques of Si thin film for location control of large grain on glass Ishihara,R., Wilt,P.Ch.van der, Dijk,B.D.van, Burtsev,A., Voogt,F.C., Bertens,G.J., Metselaar,J.W., Beenakker,C.I.M. SPIE-The International Society for Optical Engineering
5 Conference Proceedings A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-Wire Chemical Vapor Deposition Richardson, Christine E., Mason, Maribeth S., Atwater, Harry A. Materials Research Society	11 Conference Proceedings ION BEAM ENHANCED GRAIN GROWTH IN THIN FILMS Atwater, Harry A., Thompson, Carl V., Smith, Henry T. Materials Research Society
6 Conference Proceedings Grain Size Control by Means of Solid Phase Crystallization of Amorphous Silicon Jordi Farjas, Pere Roura, Pere Roca i Cabarrocas Materials Research Society	12 Conference Proceedings Location Control of Crystal Grains in Excimer Laser Crystallization of Silicon Thin Films for Single-Grain TFTs Kumomi, Hideya, Wakiyama, Hiroaki, Nakagawa, Gou, Makihira, Kenji, Asano, Tanemasa Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12