ANALYSIS OF CRITICAL PARAMETERS AFFECTING THE TEMPERATURE UNIFORMITY DURING RAPID THERMAL PROCESSING
- Author(s):
- Publication title:
- Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 342
- Pub. Year:
- 1994
- Page(from):
- 389
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992429 [1558992421]
- Language:
- English
- Call no.:
- M23500/342
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
THREE-DIMENSIONAL ASYMMETRICAL MODELING OF RAPID THERMAL ANNEALING OF SILICON WAFERS
MRS - Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
8
Conference Proceedings
X-RAY DOUBLE CRYSTAL ANALYSIS OF STRUCTURE AND STRESS RELAXATION IN SOLID PHASE EPITAXIAL CaF2 AND Ge/CaF2 FILMS ON (111) Si BY IN SITU RAPID ISOTHERMAL …
Materials Research Society |
3
Conference Proceedings
Direct Correlation Between Defects and Thermal Stress in Rapid Thermal Processing
Electrochemical Society |
Electrochemical Society |
4
Conference Proceedings
RECRYSTALLIZATION OF AMORPHOUS SILICON USING RAPID THERMAL PROCESSING LASER ANNEALING AND FURNACE HEATING
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
MRS - Materials Research Society |