Blank Cover Image

SHALLOW-JUNCTION FORMATION BY RAPID THERMAL DIFFUSION INTO SILICON FROM DOPED SPIN-ON GLASS FILMS

Author(s):
Ventura, L.
Slaoui, A.
Hartiti, B.
Muller, J. C.
Stuck, R.
Siffert, P.
1 more
Publication title:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
342
Pub. Year:
1994
Page(from):
345
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992429 [1558992421]
Language:
English
Call no.:
M23500/342
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings RAPID THERMAL OXIDATION OF HEAVILY DOPED SILICON

Slaoui, A., Hartiti, B., Busch, M. C., Muller, J. C., Siffert, P.

Materials Research Society
7 Conference Proceedings ArF EXCIMER LASER DOPING INTO AMORPHOUS SILICON THIN FILMS

Elliq, M., Slaoui, A., Fogarassy, E., Pattyn, H., Struck, R., Siffert, P.

Materials Research Society
2 Conference Proceedings RAPID THERMAL ANNEALING OF SPIN-ON GLASS FILMS

Ventura, Laurent, Hartiti, Bouchaib, Slaoui, Abdelilah, Muller, Jean-Claude, Siffert, Paul

Materials Research Society
8 Conference Proceedings BORON DOPING USING PROXIMITY RAPID THERMAL DIFFUSION FROM SPIN-ON-DOPANTS

Rastogi, M., Zagozdzon-Wosik, W., Romero-Borja, F., Heddleson, J. M., Beavers, R., Grabiec, P., Wood, L. T.

MRS - Materials Research Society
3 Conference Proceedings PHOSPHORUS GLASS DOPING OF POLYCRYSTALLINE SILICON DURING RAPID THERMAL ANNEALING

Hartiti, Bouchaib, Slaoui, Abdelilah, Stuck, Roland, Muller, Jean-Claude, Siffert, Paul

Materials Research Society
9 Conference Proceedings Classical and Rapid Thermal Process Effects on Oxygen and Carbon Precipitation in Silicon

Mahfoud, K., Loghmarti, M., Muller, J. C., Siffert, P.

MRS - Materials Research Society
4 Conference Proceedings Rapid Isothermal Annealing of Doped and Undoped Spin-On Glass Films

Slaoui, A., Ventura, L., Lachiq, A., Monna, R., Muller, J. C.

MRS - Materials Research Society
10 Conference Proceedings PHOSPHORUS GETTERING BY RAPID THERMAL PROCESSING

Hartiti, Bouchaib, Slaoui, Abdelilah, Muller, Jean-Claude, Siffeert, Paul

Materials Research Society
5 Conference Proceedings Influence of Oxygen on Rapid Thermal Co-Diffusion of Phosphorus and Aluminium in Silicon

Mahfoud, K., Hartiti, B., Muller, J. C., Siffert, P.

MRS - Materials Research Society
11 Conference Proceedings ANNEALING KINETICS DURING RAPID AND CLASSICAL THERMAL PROCESSING OF LASER AND IMPLANTATION INDUCED DEFECTS IN SILICON

Adekoya, W.O., Muller, J.C., Siffert, P.

Materials Research Society
6 Conference Proceedings Rapid Thermal Dopants Diffusion and Surface Passivation for Silicon Solar Cells Applications

Slaoui, Abdelilah, Lachiq, Aziz, Ventura, Laurent, Muller, Jean Claude

MRS - Materials Research Society
12 Conference Proceedings Formation of Ultra-Shallow Junctions in Silicon by Rapid Thermal Vapor Phase Doping in an Ultrahigh Vacuum Rapid Thermal Processing System

O'Neil, Patricia A., Violette, Katherine E., Ozturk, Mehmet C., Ivanov, Igor C.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12