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Micromachined probes for high-frequency scanning force microscopy and scanning thermal microscopy

Author(s):
Stopka,M. ( Univ.of Kassel )
Munster,S.
Leinhos,T.
Mihalcea,Ch.
Scholz,W.
Leyk,A.
Mertin,W.
Oesterschulze,E.
3 more
Publication title:
Micromachining and Imaging
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3009
Pub. Year:
1997
Page(from):
92
Page(to):
100
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424204 [081942420X]
Language:
English
Call no.:
P63600/3009
Type:
Conference Proceedings

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