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Atomic force microscope for small cantilevers

Author(s):
Schaffer,T.E. ( Univ.of California/Santa Barbara )
Viani,M.
Walters,D.A.
Drake,B.
Runge,E.K.
Cleveland,J.P.
Wendman,M.A.
Hansma,P.K.
3 more
Publication title:
Micromachining and Imaging
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3009
Pub. Year:
1997
Page(from):
48
Page(to):
52
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424204 [081942420X]
Language:
English
Call no.:
P63600/3009
Type:
Conference Proceedings

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