Research on no-guide distance measurement using internal servo interferometer optics system

Research on no-guide distance measurement using internal servo interferometer optics system

Author(s):

Zhuang,S. ( East China Univ.of Technology )
Li,M.
He,L.
Zhou,Z.
Yuan,Y.

Publication title:

Laser Processing of Materials and Industrial Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2888

Pub. Year:

1996

Page(from):

419

Page(to):

424

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422897 [0819422894]

Language:

English

Call no.:

P63600/2888

Type:

Conference Proceedings

Details

TDL ID:	ZA00020279
Series ID:	PA00000029
Conf. info. (Name):	Photonics China : Laser Processing of Materials and Industrial Applications
Conf. info. (Number):	1996
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	1996.11.06-1996.11.07

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