Actuation of polysilicon surface-micromachined mirrors
- Author(s):
Tien,N.C. ( Univ.of California/Berkeley ) Kiang,M.-H. Daneman,M.J. Solgaard,O. Lau,K.Y. Muller,R.S. - Publication title:
- Miniaturized Systems with Micro-Optics and Micromechanics
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2687
- Pub. Year:
- 1996
- Page(from):
- 53
- Page(to):
- 59
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420619 [0819420611]
- Language:
- English
- Call no.:
- P63600/2687
- Type:
- Conference Proceedings
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