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Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process

Author(s):
Bright,V.M. ( Air Force Institute of Technology )
Comtois,J.H.
Sene,D.E.
Reid,J.R.
Gustafson,S.C.
Watson,E.A.
1 more
Publication title:
Miniaturized Systems with Micro-Optics and Micromechanics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2687
Pub. Year:
1996
Page(from):
34
Page(to):
46
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420619 [0819420611]
Language:
English
Call no.:
P63600/2687
Type:
Conference Proceedings

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