Development of cost of ownership modeling at a semiconductor production facility
- Author(s):
- Nanez,R.,Jr. ( Univ.of Texas/San Antonio )
- Iturralde,A.
- Publication title:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2637
- Pub. Year:
- 1995
- Page(from):
- 211
- Page(to):
- 220
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420039 [0819420034]
- Language:
- English
- Call no.:
- P63600/2637
- Type:
- Conference Proceedings
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