Ion Sputtering of Metals in a System with a Thermionic Inert Gas Plasma Source

Ion Sputtering of Metals in a System with a Thermionic Inert Gas Plasma Source

Author(s):

Publication title:

Trends and new applications of thin films : proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998

Title of ser.:

Materials science forum

Ser. no.:

287-288

Pub. Year:

1998

Page(from):

303

Page(to):

306

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498154 [087849815X]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00020224
Series ID:	PA00000012
Conf. info. (Name):	International Symposium on Trends and New Applications of Thin Films - TATF
Conf. info. (Number):	1998 : 6th
Conf. info. (Venue):	Regensburg, Germany
Conf. info. (Date):	1998.03.00

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