Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon
- Author(s):
- Publication title:
- Trends and new applications of thin films : proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998
- Title of ser.:
- Materials science forum
- Ser. no.:
- 287-288
- Pub. Year:
- 1998
- Page(from):
- 211
- Page(to):
- 214
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878498154 [087849815X]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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