Measurement of Interstitial Oxygen Striations in Silicon Single Crystals Using the Micro-FTIR Method
- Author(s):
- Publication title:
- Shallow Impurities in Semiconductors : Proceedings of the Fifth International Conference on Shallow Impurities in Semiconductors "Physics and Control of Impurities", International Conference Center Kobe, Japan, 5 to 8 August, 1992
- Title of ser.:
- Materials science forum
- Ser. no.:
- 117-118
- Pub. Year:
- 1993
- Page(from):
- 189
- Page(to):
- 194
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878496549 [0878496548]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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