Diffusion of group-IV and-V rmpunrities in silicon at high donor concentrations a comparison be-tween experimental and theoretical results

Diffusion of group-IV and-V rmpunrities in silicon at high donor concentrations a comparison be-tween experimental and theoretical results

Author(s):

Publication title:

Shallow impurities in semiconductors : proceedings of the Fourth International Conference on Shallow Impurities in Semiconductors, King's College London, 31 July to 2 August 1990

Title of ser.:

Materials science forum

Ser. no.:

65-66

Pub. Year:

1991

Page(from):

293

Page(to):

298

Pub. info.:

Aedermannsdorf: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496198 [087849619X]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00020214
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Shallow Impurities in Semiconductors
Conf. info. (Number):	4th
Conf. info. (Venue):	London, UK
Conf. info. (Date):	1990.07.31-1990.08.02

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