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Aluminum related thermally induced defects in silicon

Author(s):
Publication title:
Shallow impurities in semiconductors : proceedings of the Fourth International Conference on Shallow Impurities in Semiconductors, King's College London, 31 July to 2 August 1990
Title of ser.:
Materials science forum
Ser. no.:
65-66
Pub. Year:
1991
Page(from):
247
Page(to):
252
Pub. info.:
Aedermannsdorf: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496198 [087849619X]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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