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Interferometric measurement of refractive index profiles for thin film characterization

Author(s):
Sheppard,C.J.R. ( Univ.of Sydney(Australia) and Australian Key Ctr. for Microscopy and Microanalysis )  
Publication title:
Optical inspection and micromeasurements II : 16-19 June 1997, Munich, FRG
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3098
Pub. Year:
1997
Page(from):
442
Page(to):
449
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425188 [0819425184]
Language:
English
Call no.:
P63600/3098
Type:
Conference Proceedings

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