3D-deformation analysis of microcomponents using digital holography

3D-deformation analysis of microcomponents using digital holography

Author(s):

Seebacher,S. ( Bremer Institut fur Angewandre strahltechnik(FRG) )
Osten,W. ( Bremer Institut fur Angewandre strahltechnik(FRG) )
Juptner,W.P.O. ( Bremer Institut fur Angewandre strahltechnik(FRG) )

Publication title:

Optical inspection and micromeasurements II : 16-19 June 1997, Munich, FRG

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3098

Pub. Year:

1997

Page(from):

382

Page(to):

391

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425188 [0819425184]

Language:

English

Call no.:

P63600/3098

Type:

Conference Proceedings

Details

TDL ID:	ZA00020194
Series ID:	PA00000029
Conf. info. (Name):	Lasers, Optics, and Vision for Productivity in Manufacturing : Optical Inspection and Micromeasurements
Conf. info. (Number):	1997 : 2nd
Conf. info. (Venue):	Munich, FRG
Conf. info. (Date):	1997.06.16-1997.06.19

Similar Items:

1 Conference Proceedings Combined 3D-shape and deformation analysis of small objects using coherent optical techniques on the basis of digital holography Seebacher,S., Baumbach,T., Osten,W., Juptner,W.P.O. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Particle analysis with digital holography Adams,M., Kreis,T.M., Juptner,W.P.O. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Application of digital holography for the inspection of microcomponents Osten,W., Seebacher,S., Juptner,W.P.O. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Combined measurement of shape and deformation of microcomponents by holographic interferometry and multiple-wavelength contouring Seebacher,S., Osten,W., Wagner,Chr. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Measuring shape and deformation of small objects using digital holography Seebacher,S., Osten,W., Juptner,W.P.O. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Deformation and 3D-shape measurement system based on phase-shifting digital holography Lai,S.C., Kolenovic,E., Osten,W., Juptner,W. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Absolute shape control of microcomponents using digital holography and multiwavelength contouring Osten,W., Seebacher,S., Baumbach,T., Juptner,W.P. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Determination of geometric properties of SNOM tips by means of combined far-field and near-field evaluation Seebacher,S., Osten,W., Juptner,W.P.O., Veiko,V.P., Voznessenski,N.B. SPIE - The International Society for Optical Engineering
5 Conference Proceedings Qualification of optical measurement techniques for the investigation of material parameters of microcomponents Osten, W., Juptner, W. P., Seebacher, S., Baumbach, T. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Characterization of micro-optics using digital holography Kebbel,V., Hartmann,H.-J., Juptner,W.P.O. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Combined measurement of silicon microbeams by grating interferometry and digital holography Juptner, W., Kujawinska, M., Osten, W., Salbut, L., Seebacher, S. SPIE--International Society for Optical Engineering	12 Conference Proceedings Digital in-line holography in particle measurement Kreis,T.M., Adams,M., Juptner,W.P.O. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12